These are samples of scientific projects developed with the help of FIBRotools™ technology:
NEW! 1. "Influence of Ta-based Diffusion Barriers on the Microstructure of Copper Films"; by M. Stangel, A. Fletcher, J. Acker, H. Wendrock, and K. Wetzig, J. of Electronic Materials, Vol. 36, No. 12 (2007) 1625-1629. (289 Kb pdf file)
NEW! 2. "Segregation of organic impurities in thin electroplated Cu metallizations"; by M. Stangl, J. Acker, V. Hoffmann, W Gruner, and K. Wetzig, Microchimica Acta 156, (2007) 159-162. (187 Kb pdf file)
3. "Verhalten organisher Verunreinigungen in elektrochemisch abgeschiedenem Kupfer wahrend des self-annealings bei Raumtemperatur."; by M. Stangel, V. Dittel, J. Acker et al. Galvanotechnik 7 (2005) 1576-1580. (2 Mg pdf file)
4. "Investigation of organic impurities adsorbed on and incorporated into electroplated copper layers"; M. Stangel, Dittel, J. Acker et al., Applied Surface Science 252 (2005) 158-161. (257 Kb pdf file)
5. "Direct Electroplating on Highly Doped Patterned Silicon Wafers"; L.D. Vargas Liona, H.V. Jansen and M.C. Elwenspoek, Proceedings from the MicroMechanics Workshop, Europe MME 05', Sweden, 2005. (610 Kb pdf file)
6. "Characterization of electroplated copper self-annealing with investigations focused on incorporated impurities"; M. Stangl, J. Acker, V. Dittel, W. Gruner, V. Hoffmann, K. Wetzig, Microelectronic Engineering 82 (2005) 189–195. (341 Kb pdf file)
7. "Seedless electroplating on patterned Silicon"; L.D. Vargas Llona, H.V. Jansen and M.C. Elwenspoek, J. Micromech. Microeng. 16 (2006) S1–S6. (758 Kb pdf file)
8. "AAsize micro power conversion cell for wireless applications" by Wen J. Li at al. Proceedings of the 5" World Congress on Intelligent Control and Automation, June 15-19, 2004, Hangzhou, P.R. China. (394 Kb pdf file)
9. "Polymer Based Vortex Micropump Fabricated by Micro Molding Replication Technique" by Wen J.i at al. Proceedings of 2004 1EEElRS.J international Conference on Intelligent Robots and Systems September 28. October 2,2W4, Sendai, Japan. (426 Kb pdf file)
10. Institute of Robotics and Intelligent Systems, bulletin; by K. Vollmers, B.J. Nelson at al.
11. Micro- and Nanosystems, by W. Glatz at al.
12. "FIBRoplate
IKo," 2003 Technology Applications Report, Missile
Defense Agency, DoD (88 Kb pdf file)
13
. "New Wet Processing
for HDIs," I. Kadija and J. Russell, CircuiTree,
May 1999, p. 60. (Also presented at the International
Expo '99 conference in Anaheim.)
(2.6 Mb pdf file)
14
. "A Novel Wet Processing
Technology," I.V. Kadija, Proceedings of the
Symposium on High Rate Metal Dissolution Processes,
The Electrochemical Society, Proceedings Volume 95-19. (765
Kb pdf file)