The IKo-2W6 can simultaneously process any two wafers,
2" to 8" diameter, each with identical or
totally independent hydrodynamic conditions and current
control.
- micro/macro uniformity <5% across the wafer
- superior process control for sub-mil features
- low purchase and operating costs
- smallest bench-top twin-plater footprint on the market (40"X30")
- simultaneously processes two wafers 2" to 8" diameter
- capable of DC/RP running 1-15A average and 3-30A peak current
- equipped with FIBRotools wafer holders for uniform current up to 7.5A/piece
- thick deposits up to millimeter or more if needed
- extremely fast -- typically, 1-2µ per minute
- uses off-the-shelf chemistries with minimal additives
- efficiently reuses chemical solution
- easy to use/maintain
IKo-2W6 is fabricated with PVC and polypropylene and a minimum of metal parts to avoid potential contamination of electroplating solutions. Metal features are stainless and titanium. All parts can be easily disassembled for maintenance.
IKo-2W6 is made up of two sections:
Electroplating Section -- conveniently accessible while preparing
wafers for plating
Control Box – raised over the Electroplating
Section with two individual plating sections, one for each wafer.
IKo's arrangement of wafer holder, reciprocating anode, reverse pulse rectifier and pump ensure surpassing performance:
The unit is designed so that each anode/wafer holder set can be individually operated without interrupting the processing of the other wafer.
- Wafer holders,
ergonomically designed for easy processing and
handling. A full-circle, elastic electric gasket/contact provides
uniform current distribution. Result: uniform thickness features
across the wafer without leaking solution to the back of the
wafer.
- Reciprocating anode,
a proprietary feature. Provides for an efficient exchange of
matter and uniform electric field distribution.
- Programmable reverse-pulse rectifier,
contributes to equipment versatility in handling two individual
wafers.
- Two fan-out pumps (400 GPH each) with constant filtration (regardless of fine filter medium). Provide a steady-state supply of high-quality bulk solution to each plating section.
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| input power: | 220/120 VAC +/-10%, 50-60 Hz single phase line current 5.0/10.0 A |
| metals plated: | Cu, Ni, Pd, Pt, Au, Sn, Pb, Fe, Ag, Permalloy, Pd/Ni, Sn/Pb and others |
Programmable Reverse Pulse Power Supply Options Including: |
|
| current pulse avg: | 1-15 A |
| current peak: | 3-30 A |
| volts: | 0-20 |
| regulation accuracy: | ±1% of setting or 0.1% of peak rating, whichever is greater |
| ripple: | < 1% RMS of maximum rated output voltage |
| timing: | Forward/Reverse XX.XXmS to XX.XX Seconds |
| on/off timing: | XX.XXmS to XX.XX Seconds |
| resolution: | xx.xx,xxx.x Min or Hours, xxx.x Seconds |
| frequency range: | 0-5000Hz |
| anode insoluble: | any two 2" to 8" FIBRotools anodes with Pt/Ti. |
| anode soluble: | any two 2" to 8" FIBRotools titanium baskets with bags. |
| wafer holders: | any two 2" to 8" wafer holders, full circle contact each |
| filtration: | continuous-cartridge, 400 GPH, 1 µ |
| venting: | Fume exhaust attachment |
| heater: | two thermostats, 160F max., 550 Watt |
| rec. frequency: | 0 2.7 Hz |
| solution volume: | 16 liters |
| footprint: | 40" wide, 30" deep (28" high) |
Start-Up Support
ECSI provides operating and maintenance manual and initial technical assistance and training as specified bellow:
. a. Free of charge training at the Seller's or Buyers location for first two (2) days;b. Travel, room and board expenses paid by the Buyer for the first 2 (two) days at the Buyer's location;
c. At the prevailing hourly rate for any additional day beyond 2 (two) initial days.