The original IKo CLASSIC™
plus capability to electroplate directly on doped silicon, resistance
5e-3 ohm-cm or less. Electroplating uniformity enabled with proprietary
wafer holder design.
- micro/macro uniformity <5% across the wafer
- seedless electroplating capability
- superior process control for sub-mil features
- low purchase and operating costs
- smallest plater footprint on the market (26"X28")
- handles various-sized wafers (2" to 8")
- simultaneously processes up to three 2" wafers
- extremely fast -- typically, 1µ per minute
- uses off-the-shelf chemistries with minimal additives
- efficiently reuses chemical solution
- easy to use/maintain
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IKO CLASSIC-SL is fabricated with PVC and polypropylene
and a minimum of metal parts to avoid potential contamination of electroplating
solutions. Metal features are stainless and titanium. All parts can be
easily disassembled for maintenance.
The unit is made up of two sections:
Electroplating Section -- conveniently accessible while preparing
wafers for plating.
Power Section -- rolls over the Electroplating Section for processing.
IKo's arrangement of wafer holder, reciprocating anode, reverse
pulse rectifier and pump ensure surpassing performance:
- Wafer holder, ergonomically designed
for easy processing and handling. IKo can accommodate various wafer
sizes. A full-circle, elastic electric contact provides uniform current
distribution. Result: uniform thickness features across the wafer.
- Reciprocating anode, a proprietary feature.
Provides for an efficient exchange of matter and uniform electric field
distribution.
- Programmable Reverse-pulse rectifier, contributes
to equipment versatility. Reverse-pulse current during processing efficiently
controls plating thickness distribution along the Z-axis.
- Fan-out pump with constant filtration (regardless
of fine filter medium). Provides a steady-state supply of high-quality
bulk solution.
- Seedless Electroplating option with doped Silicon substrates resistance 5e-3 ohm-cm and less – enabled with proprietary wafer holder design.
| input power: | 220/120 VAC =/-10%, 50-60 Hz, 5/10A |
| wafer size: | 2" to 8" |
| metals plated: | Cu, Ni, Pd, Au, Sn, Pb, Pt, Fe, Ag, Permalloy, Sn/Pb, Pd/Ni and others |
| current DC and pulse avg: | 0.1A, 1.0A and 3.0A |
| current peak: | 0.3A, 3.0A and 6.0A |
| volts: | 0-10 |
| control: | sealed keypad for setup of optional controls and features |
| on/off timing: | 4 digit 0.01 mS to 99 seconds |
| programmable timer: | 4 digit realtime |
| stability: | +/- 1mA |
| ripple: | less 1% |
| anode insoluble: | FIBRoplate anode |
| anode soluble: | FIBRoplate titanium basket |
| rec. frequency: | 0-2.7 Hz |
| wafer holder: | FIBRotoolsTM design for seedless plating |
| filtration: | Continuous-cartridge, 400 GPH with 1µ filtration |
| venting: | Fume exhaust attachment |
| heater: | Thermostat, 160F max., 550 Watt |
| solution volume: | 2.1 Gal, 8 liters |
| footprint: | 26" wide, 28" deep, 28" high |
Start-Up Support
ECSI provides operating and maintenance manual and initial technical assistance and training as specified bellow:
a. Free of charge training at the Seller's or Buyers location for first two (2) days;b. Travel, room and board expenses paid by the Buyer for the first 2 (two) days at the Buyer's location;
c. At the prevailing hourly rate for any additional day beyond 2 (two) initial days.