The IKo STATION™ is a self-contained, complete plating system for MEMS and NANO fabrication – wafer installation, cleaning, activation, DI rinsing and electroplating – ideal for a wide range, 2 cm2 to 8" odd shape substrates and wafers. Easily retrofitted to a cleanroom environment.
- micro/macro uniformity <5% across the wafer
- superior process control for sub-mil features
- low purchase and operating costs
- handles various-sized wafers (2 cm2 to 8")
- identical hydrodynamics for all sizes if needed
- wafer cleaning and plating preparation under the same hood
- extremely fast – typically, 1µ per minute
- uses off-the-shelf chemistries with minimal additives
- efficiently reuses chemical solution
- easy to use/maintain
The IKo Station contains all accessories for processing wafers under one hood. The unit is fabricated with PVC and polypropylene and a minimum of metal parts to avoid potential contamination of electroplating solutions. Metal features are stainless and titanium. All parts can be easily disassembled for maintenance.
Dual power supply for precision reverse pulse plating or potentiostatic operation.
IKoStation's arrangement of wafer holder, reciprocating anode, reverse pulse rectifier and pump ensure surpassing performance:
- Wafer holders, ergonomically designed for easy processing and handling. A full-circle, elastic electric gasket/contact provides uniform current distribution. Result: uniform thickness features across the wafer without leaking solution to the back of the wafer.
- Reciprocating anode, a proprietary feature. Provides for an efficient exchange of matter and uniform electric field distribution.
- Reverse-pulse rectifier combined with the potentiostat, contribute to equipment versatility. Reverse-pulse current during processing efficiently controls plating thickness distribution along the Z-axis. Potentiostat enables electroplating at precisely-selected potential for specific MEMS and NANO structures.
- Fan-out pump with constant filtration (regardless of fine filter medium). Provides a steady-state supply of high-quality bulk solution.
| input power: | 220/120 VAC +/-10%, 50-60 Hz, single phase, 15/30 A | |
| hood size: | 5’ x 3’ x 6’, construction material - Polypropylene | |
| wafer size: | 2cm2 to 8" | |
| metals plated: | Cu, Ni, Pd, Au, Sn, Pb, Pt, Fe, Ag, Permalloy, Sn/Pb, Pd/Ni and others | |
Reverse Pulse Power Supply |
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| current DC/avg. max: | 0.1 A, 1 A, 3 A, 5 A, 10 A | |
| current peak: | 0.3 A, 3 A, 6 A,10 A, 20 A | |
| volts: | 0-10 V (higher voltages available) | |
| on/off timing: | upt to 5,000 Hz | |
| programmable timer: | 4 digit realtime | |
| stability: | +/- 1 mA | |
| ripple: | 1% | |
Potentiostat/Galvanostat: |
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| potentiostat: | 3 electrode system | |
| current DC max: | 1 A | |
| ref. electrode: | Ag/AgCl or calomel | |
| Luggin capillary attachment | ||
Electroplating Section |
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| solution volume: | 2.1 Gal, 8 liters | |
| anode insoluble: | FIBRoplate™ anode | |
| anode soluble: | FIBRoplate™ titanium basket | |
| wafer holder: |
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Accessories |
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| rinse tank: | 10" x 12" x 12", cascade flow | |
| conditioning tank: | 10" x 10" x 12", two sections | |
| add’l feature: | Bench-top pH meter | |
| N2/DI: | Air/Nitrogen gun and DI water spray handy for wafer processing |
Start-Up Support
ECSI provides operating and maintenance manual, installation (IKo CLASSIC and IKo 4W8 only) and initial technical assistance and training as specified bellow:
a. Free of charge training at the Seller's or Buyer’s location for first two (2) days;b. Travel, room and board expenses paid by the Buyer for the first 2 (two) days at the Buyer's location;
c. At the prevailing hourly rate for any additional day beyond 2 (two) initial days.